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Information × Registration Number 0218U005179, 0114U001890 , R & D reports Title Development and creation of technologies of growth of nanocrystalline multicomponent structures of nonvolative memory for information systems popup.stage_title Head Litovchenko Volodymyr Grygorovych, Lisovskyy Igor Petrovich, Registration Date 08-06-2018 Organization Institute of Semiconductor Physics popup.description2 Report on SRW: 11 р., 1 part, 5 tables, list of publications by a project. As a result of implementation of project the technology for creating of nanocrystalline multicomponent systems of non-volatile memory of ultrahigh capacity, based on processes of ion-plasma sputtering of oxide or oxynitride of silicon and the following formation annealing was developed, the existing technological equipment was modernized, a measuring stand for the determination of the electrophysical characteristics of multilayer nanocrystalline systems was developed. The developed memory elements have significant advantages over the existing ones: significantly less (from 2 to 4 times) the amplitude of impulses of charge write / erase, significantly greater degradation resistance (up to 10e10 cycles) and noticeably longer time of non-volatile storage of information. Key words: technology, memory, multicomponent structure, silicon oxynitride, nanocrystalline system, information. Product Description popup.authors Євтух Анатолій Антонович Бpатусь Ігор Олегович Войтович Марія Володимирівна Злобін Сергій Олександрович Лісовський Ігор Петрович Литовченко Володимир Григорович popup.nrat_date 2020-04-02 Close