Registration Number
0218U005179,
0114U001890
, R & D reports
Title
Development and creation of technologies of growth of nanocrystalline multicomponent structures of nonvolative memory for information systems
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Head
Litovchenko Volodymyr Grygorovych, Lisovskyy Igor Petrovich,
Registration Date
08-06-2018
Organization
Institute of Semiconductor Physics
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Report on SRW: 11 р., 1 part, 5 tables, list of publications by a project. As a result of implementation of project the technology for creating of nanocrystalline multicomponent systems of non-volatile memory of ultrahigh capacity, based on processes of ion-plasma sputtering of oxide or oxynitride of silicon and the following formation annealing was developed, the existing technological equipment was modernized, a measuring stand for the determination of the electrophysical characteristics of multilayer nanocrystalline systems was developed. The developed memory elements have significant advantages over the existing ones: significantly less (from 2 to 4 times) the amplitude of impulses of charge write / erase, significantly greater degradation resistance (up to 10e10 cycles) and noticeably longer time of non-volatile storage of information. Key words: technology, memory, multicomponent structure, silicon oxynitride, nanocrystalline system, information.
Product Description
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Євтух Анатолій Антонович
Бpатусь Ігор Олегович
Войтович Марія Володимирівна
Злобін Сергій Олександрович
Лісовський Ігор Петрович
Литовченко Володимир Григорович
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2020-04-02
