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Information × Registration Number 0219U100595, 0117U004875 , R & D reports Title The technology of forming the vacuum-plasma structural components for nanoelectronics popup.stage_title Head Bazhyn Anatolij I., Доктор фізико-математичних наук Registration Date 20-02-2019 Organization Scientific Center of Physical Technologies popup.description2  The results of calculations of plasma parameters are obtained. The reactive module of ion-plasma digestion has been developed. Experimental measurements of plasma parameters in a discharge chamber of the plasmochemical and reactive ion-plasma digestion have been obtained. The samples of formed nanosized elements for electronics and their physical and technical characteristics were obtained. Product Description popup.authors popup.nrat_date 2020-04-02 Close