Registration Number
0219U100595,
0117U004875
, R & D reports
Title
The technology of forming the vacuum-plasma structural components for nanoelectronics
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Head
Bazhyn Anatolij I., Доктор фізико-математичних наук
Registration Date
20-02-2019
Organization
Scientific Center of Physical Technologies
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The results of calculations of plasma parameters are obtained. The reactive module of ion-plasma digestion has been developed. Experimental measurements of plasma parameters in a discharge chamber of the plasmochemical and reactive ion-plasma digestion have been obtained. The samples of formed nanosized elements for electronics and their physical and technical characteristics were obtained.
Product Description
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2020-04-02
