Registration Number
0219U102201,
0119U102844
, R & D reports
Title
New plasmonic nanomaterials based on laterally-ordered structures of noble metals for precise, rapid analysis of high-molecular compounds by spectroscopy of surface-enhanced Raman light scattering
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Head
Dan'ko Viktor A., Кандидат фізико-математичних наук
Registration Date
21-12-2019
Organization
V. Lashkaryov Institute of semiconductor physics
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Report on research work “New plasmon nanomaterials based on laterally ordered structures of noble metals for precise express analysis of high molecular weight compounds by spectroscopy of surface-enhanced Raman light scattering». Stage No. 1. Establishing the laws governing the formation of relief-phase plasmon structures with specified parameters and optimizing the technological processes of interference lithography for their manufacture ”: p. 45, Fig. 18 tab. 2.
Object of study: Manufacturing technology of SERS substrates for the detection of high molecular weight compounds in submolar concentration.
Project goal: Establishing patterns of formation and manufacturing of laterally ordered arrays of noble metals nanostructures (SERS substrates) formed on glass and silicon substrates by the method of interference photolithography, as well as the study of their morphological, optical and electrical properties for the development of new plasmon nanomaterials that allow fast detection high molecular weight compounds in submolar concentration and analyze their structure using surface-enhanced Raman spectroscopy.
Based on the results of numerical modeling and experimental studies, the technological process of interference photolithography using chalcogenide photoresists for the manufacture of SERS substrates wаs optimized.
Optical schemes have been created for interference lithography of such structures, equipment for applying a chalcogenide photoresist, an adhesion and plasmon-supporting layer, a bench for the precise determination of the spatial frequency of periodic structures on the surface of SERS substrates, a method for characterizing a one-dimensional periodic plasmon structure.
Prototypes of SERS substrates were made.
Keywords: surface- enhanced Raman light scattering spectroscopy, SERS substrates, interference lithography, vacuum chalcogenide photoresists.
Product Description
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Indutnyi Ivan Z.
Lukanyuk Mariya V.
Min’ko Viktor I.
Sopinskyy Mykola V.
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2020-04-02
