Search academic texts

Information × Registration Number 0221U104794, 0120U104287 , R & D reports Title Development and fabrication of automated system for sample positioning, unballansing magnet system, and optimisation of driving units for vacuum deposition process for goals of nanotechnologies and microelectronics. Stage 1. Development of technical documentation, fabrication and installation of drivung units for deposition process. popup.stage_title Head Vasin Andrii V., Доктор фізико-математичних наук Registration Date 15-04-2021 Organization V. Lashkaryov Institute of semiconductor physics popup.description2  Technical documentation for the mechanism of automatic movement of the moving magnet of the magnetron and the mechanism of the regulator of speed of vacuum pumping out of the working chamber VUP-5, and the mobile screen of the cathode unit have been developed. According to the developed design documentation, parts/devices were manufactured and installed in the working chamber of the VUP-5 unit Product Description popup.authors Kysil Dmytro V. Rusavsky Andriy V. Stepanov Volodymyr H. popup.nrat_date 2021-04-15 Close