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Information × Registration Number 0222U002946, 0122U000571 , R & D reports Title Development and manufacture of an automated positioning system for samples, a mechanism for unbalancing the magnetic field of the magnetron and optimization of control devices for the process of vacuum deposition for nanotechnology and microelectronics Stage 2: "Production of the mechanism for moving the unbalancing magnet and development of design documentation for the scanning sample holder popup.stage_title Head Vasin Andrii V., д.ф.-м.н. Registration Date 16-02-2022 Organization VE Lashkarev Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine popup.description2  According to the developed design documentation the mechanism of automatic movement of the unbalancing magnet of the magnetron with the indicator of its position was made and established on VUP-5. Installation of the mechanism of automatic movement of the unbalancing magnet of the magnetron with the indicator of its position on VUP-5 ISP NASU was carried out. Design documentation was developed for the sample holder (table) with the mechanism of its controlled movement in the direction and speed in two coordinates, and for the power supplies of the mechanisms Product Description popup.authors Kysil Dmytro V Rusavsky Andriy Vadymovych Stepanov Volodymyr H popup.nrat_date 2022-03-09 Close
R & D report
Head: Vasin Andrii V.. Development and manufacture of an automated positioning system for samples, a mechanism for unbalancing the magnetic field of the magnetron and optimization of control devices for the process of vacuum deposition for nanotechnology and microelectronics Stage 2: "Production of the mechanism for moving the unbalancing magnet and development of design documentation for the scanning sample holder. (popup.stage: ). VE Lashkarev Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine. № 0222U002946
1 documents found

Updated: 2026-03-27