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Registration Number

0222U004636, 0119U103449 , R & D reports

Title

Metrological support of nanosurveys

Head

Kvasnikov Volodymyr P., Доктор технічних наук

Registration Date

22-09-2022

Organization

National Aviation University

Description

The object of the research is the means of measuring mechanical quantities, built according to the principles of scanning probe microscopy for studying the peculiarities of the relief of the surface of objects in the nanometer range, and software and hardware means of recognition, processing and visualization of measurement information. The goal of the project is the development and implementation of methods, means and systems for measuring mechanical nanoquantities, taking into account the influence of external destabilizing factors, determining the components of measurement errors, their autocompensation using precision measuring equipment, building an intelligent measuring complex that will ensure the improvement of metrological characteristics of nanomeasurements. Research methods. Methods based on the theory of measuring systems and scanning probe microscopy, methods of simulation modeling and software-mathematical support were used to solve the given problem. The result of the work is the creation of metrological support for nano-measurements, which includes the development of enterprise standards for the optimal selection of means of measuring the geometric parameters of objects in the nanometer range, the development of methods of their measurement, the development of new and improvement of existing means and methods of nano-measurements with increased accuracy, speed and compensation of the influence of external destabilizing factors, the development of new methods of measuring the geometric parameters of nano-objects with a complex spatial surface, which are based on the coordinate-zero principle of the implementation of the measurement process and on element-by-element bypass of the trajectory of the part with the construction of a three-dimensional image with minimal measurement error under the conditions of action of destabilizing factors.

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Katayeva Maryea O.
Stakhova Anzhelika P.
Filonenko Serhii F.
Shelukha Oleksii O.
Shkvarnytska Tetiana Y.
Yurchuk Alina A.