Registration Number
0224U001992,
0121U110283
, R & D reports
Title
Low-temperature formation of nanosized thin-film materials with shape memory effect for modern microelectromechanical systems
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Head
Orlov Andrii K.,
Registration Date
03-02-2024
Organization
National Technical University of Ukraine "Igor Sikorsky Kyiv Polytechnic Institute"
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The aim of work. Establishing the regularities of low-temperature diffusion phase formation in Ni/Ti film compositions with a shape memory effect depending on the physical and technological parameters of their deposition and thermal treatment, as well as the presence of additional intermediate layers and an increase in the number of internal interfaces between nanoscale layers of Ni and Ti.
Main results. The regularities of the thermally induced formation of the structure, phase composition and properties of thin-film materials based on the Ni/Ti system have been established, which are as follows:
• regularities of phase formation in the Ni/Ti system with different modulation period (thickness) and different number of interfaces (from one to three) while maintaining the total thickness of the system (60 nm) are determined;
• the influence of the modulation period in the Ni/Ti system with different number of layers on the temperature dependence of the electrical resistivity is determined;
• the sequence of phase formation and the temperature intervals of their stability depending on the heat treatment environment, which was carried out in vacuum and argon, were determined;
• with the use of structural techniques the change of the stress state in the Ni/Ti system with different modulation periods and number of nanolayers was explored; it is shown that an increase in the number of internal interfaces between metal layers allows to reduce the amount of residual macro-stresses;
• the use of synchrotron radiation allows to show that the release of Ti on the outer surface is taking place upon heat treatment up to the complete disappearance of the signal from Ni;
• the effect of additional layers of metals (Ag, Cu) on the regularities of diffusion phase formation in the Ni/Ti binary system has been determined; it has been shown that the addition of an intermediate Ag layer prevents structural amorphization at the interface.
Product Description
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Andrii P. Burmak
Kruhlov Ivan O.
Lesyk Dmytro A.
Vladyslav V. Mohylko
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2024-02-03
