Registration Number
0210U003420,
0107U002295
, R & D reports
Title
Theoretical and experimental researches of plasma methods of synthesis of composite nano- structures with predicted parameters
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Head
Farenik Volodymyr Ivanovych,
Registration Date
03-02-2010
Organization
Scientific Center of Physical Technologies, Ministry of Education and Science and National Academy of Science Ukraine
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Investigational to the physical and technological aspects of nanoscaled Ti-O-N and Cr-O-N films formation by ion beam sputtering and ion beam assisted deposition methods and to optimization of processes of receiption of functional nanoscaled films and nanostructures with the beforehand set properties. Due to their remarkable properties nanoscaled films of metal nitrides and oxynitrides are intensively studied and applied in technology both as protective coatings and functional films for novel electronic devices fabrication in modern semiconductor industry. Development and optimization of methods of stable nanoscaled films formation and also their study is important and perspective direction of researches in the solid state physics.
Product Description
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Береснєв Вячеслав Мартинович
Кропотов Олександр Юрійович
Приходько Володимир Іванович
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2020-04-02
