Registration Number
0214U008063,
0108U003194
, R & D reports
Title
Development and manufacturing of pulsed laser spectroscopy methods and equipment for control of atomic composition of materials and structures for nanoelectronics
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Head
Fedorenko Leonid, Tetyorkin Volodymyr,
Registration Date
27-06-2014
Organization
Institute of Semiconductor Physics of National Academy of Sciences of Ukrain
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Development of testing methods of diagnosis for each of the relevant structures of the chemical elements : the establishment of correlations between the intensities of lines of atomic spectra and radiative transitions, the intensity of the laser pulse; quantifying the relationship between the intensities of lines of atomic spectra and radiative transitions, the relative proportions of atoms in the nanometer layers; establish the quantitative relationship between the intensities of lines of atomic spectra and radiative transitions depth outermost layer of the target.
Product Description
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Тетьоркін В.В.
Федоренко Л.Л.
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2020-04-02
