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Information × Registration Number 0214U008304, 0114U003540 , R & D reports Title Developent of the technology for deposition of nanocrystalline silicon carbide films for the production of high-stability temperature sensors on their base popup.stage_title Head Lopin Aleksandr Vladimirovich, Registration Date 25-12-2014 Organization Institute for Single Crystals National Academy of Sciences of Ukraine popup.description2 Nanocrystalline silicon carbide films of the required polytypes are obtained. Studied are the optical and electrophysical properties of high-stability films with a specific resistance of 100-100000 Ohm cm. Pilot fast temperature sensors with a dynamical range of about 100 are produced. Their electrical parameters are studied at temperatures of 2 K- 673 K. Within the investigated temperature range the resistance changes by 90 - 110 times. Product Description popup.authors Козьма Володимир Олександрович Мудрова Ельвира Олександрівна Пузіков Вячеслав Михайлович Семенов Олександр Володимирович Скорик Станіслав Миколайович Шморгун Віта Петрівна popup.nrat_date 2020-04-02 Close