Registration Number
0214U008304,
0114U003540
, R & D reports
Title
Developent of the technology for deposition of nanocrystalline silicon carbide films for the production of high-stability temperature sensors on their base
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Head
Lopin Aleksandr Vladimirovich,
Registration Date
25-12-2014
Organization
Institute for Single Crystals National Academy of Sciences of Ukraine
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Nanocrystalline silicon carbide films of the required polytypes are obtained. Studied are the optical and electrophysical properties of high-stability films with a specific resistance of 100-100000 Ohm cm. Pilot fast temperature sensors with a dynamical range of about 100 are produced. Their electrical parameters are studied at temperatures of 2 K- 673 K. Within the investigated temperature range the resistance changes by 90 - 110 times.
Product Description
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Козьма Володимир Олександрович
Мудрова Ельвира Олександрівна
Пузіков Вячеслав Михайлович
Семенов Олександр Володимирович
Скорик Станіслав Миколайович
Шморгун Віта Петрівна
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2020-04-02
