Registration Number
0225U001670,
(0120U101035)
, R & D reports
Title
Beam formation in high-resolution proton beam writing facility.
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Формування пучка в установках протонно-променевої літографії високої роздільної здатності.
Head
Ponomarov Oleksandr H., Доктор фізико-математичних наук
Registration Date
04-02-2025
Organization
Institute of Applied Physics National Academy of Sciences of Ukraine
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The objective of the work is development of probe-forming systems with aberration correction for the proton-beam writing for enhancing their resolution through zooming out the beam to <10 nm.
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The current state of experimental facilities for proton beam writing has been reviewed, their shortcomings have been identified, and ways of their improvement have been established. A formalism has been constructed and software has been developed for determining the ion-optical characteristics of an octupole lens based on the matrizant method taking into account chromatic and spherical aberrations. A formalism has been constructed and software has been developed for full and partial correction of intrinsic spherical aberrations in quadrupole probe-forming systems for proton beam writing based on optimization of the reduced collimated acceptance. A study of high-resolution quadrupole probe-forming systems with correction of spherical aberrations for ion beams with an non homogeneous distribution of particles in phase space has been conducted. A probe-forming system based on a single-parameter separated quadruplet of magnetic quadrupole lenses has been investigated, in which the first lens has an independent power supply, and the last three lenses are connected to two current sources. The channel of the nuclear scanning microprobe in the proton beam writing mode has been improved. A system for rapid beam removal from the optical axis has been developed. A system for measuring the parameters of the focused beam on the target has been automated. A vector method for scanning the focused beam over the sample surface has been developed. Pilot experiments of proton beam writing on a new organic material, chitosan, have been conducted.
Product Description
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Ihnatiev Ihor H.
Voznyi Vitalii I.
Zhurakulov Vladyslav V.
Kozachok Olena V.
Kolinko Serhii V.
Mahilin Dmytro V.
Polozhii Hlib Ye.
Ponomarov Oleksandr H.
Rebrov Volodymyr A.
Salyvon Vadym F.
Shulha Dmytro P.
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2025-02-04
