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Information × Registration Number 0105U001127, ( 0208U000813  ) R & D request Title Low-temperature obtaining of films based on silicon and carbon carbide at low-energy ion deposition Head Семенов Олександр Володимирович, Registration Date 01-03-2005 Organization Institute for single crystals NASU popup.description1 popup.nrat_date 2024-12-11 Close