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Information × Registration Number 0110U006270, ( 0211U005244  0212U006073  0212U006376  0213U001390  0214U006158  0214U008905  ) R & D request Title Research and development of ion-plasma technologies for formation of silicon composites at introduction of stimulating self-organization processes impurities. Head Євтух Анатолій Антонович, Registration Date 12-10-2010 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close
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Research and development of ion-plasma technologies for formation of silicon composites at introduction of stimulating self-organization processes impurities.
Head: Євтух Анатолій Антонович. Research and development of ion-plasma technologies for formation of silicon composites at introduction of stimulating self-organization processes impurities.. V. Lashkaryov Institute of semiconductor physics. № 0110U006270
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Updated: 2026-03-16


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