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Information × Registration Number 0115U000380, ( 0218U001090  ) R & D request Title Developing of methods for obtaining and metrological support of complex semiconductors and device structures Head Власенко Олександр Іванович, Томашик Василь Миколайович, Registration Date 20-02-2015 Organization V. Lashkaryov Institute of semiconductor physics popup.description1 popup.nrat_date 2024-12-10 Close