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Information × Registration Number 0115U001364, ( 0216U001193  ) R & D request Title Development and research of a new type of plasma source for uniform processing of large surfaces on the basis of the helicon discharge with a linear excitation system. Head Вірко Валерій Федорович, Registration Date 25-05-2015 Organization Institute for Nuclear Research of NAS of Ukraine popup.description1 popup.nrat_date 2024-12-10 Close
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Development and research of a new type of plasma source for uniform processing of large surfaces on the basis of the helicon discharge with a linear excitation system.
Head: Вірко Валерій Федорович. Development and research of a new type of plasma source for uniform processing of large surfaces on the basis of the helicon discharge with a linear excitation system.. Institute for Nuclear Research of NAS of Ukraine. № 0115U001364
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Updated: 2026-03-20


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