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Information × Registration Number 0118U003782, R & D request Title Modeling of physical processes in a pulsed magnetron sputtering system Head Котовський Віталій Йосипович, Registration Date 27-02-2018 Organization National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” popup.description1 popup.nrat_date 2024-12-10 Close