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Information × Registration Number 0119U101847, R & D request Title Study of phosphorus diffusion into silicon from solid sources Head Ostrovskyi Ihor P., Доктор технічних наук Registration Date 22-05-2019 Organization Lviv Polytechnic National University popup.description1 Investigation of the processes of phosphorus diffusion into silicon plates using experimental samples - solid phosphorus sources popup.nrat_date 2024-12-10 Close