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Information × Registration Number 0120U102219, ( 0225U002908  ) R & D request Title Methods of diagnostics of multilayer nanoscale structures using time-of-flight mass spectrometry Head Romaniuk Borys M., д.ф.-м.н. Registration Date 27-04-2020 Organization V. Lashkaryov Institute of Semiconductor Physics of National Academy popup.description1 Development of a technique for diagnostics of impurity composition of nanocrystalline structures and processes of ion-stimulated transformation of interfacial boundaries in multilayer nanoscale structures using the time-of-flight mass spectrometry method, as well as changes of the isotopic composition of nanomaterials under the action of powerful energy beams. popup.nrat_date 2024-12-10 Close