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Information × Registration Number 0121U113777, R & D request Title Computerized system for diagnosing and controlling the parameters of microsystem technology components by atomic force microscopy Head Bondarenko Maksym O., Доктор технічних наук Registration Date 11-11-2021 Organization Cherkasy State Technological University popup.description1 The aim of the work is to develop a computerized system of diagnostics and control by improving existing and creating new methods, models and tools of atomic force microscopy, which are part of the mathematical, methodological and hardware of such a system, which increases the accuracy and efficiency of diagnosis and control parameters of microsystem technology components popup.nrat_date 2024-12-09 Close