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Information × Registration Number 0125U001384, R & D request Title Experimental methods of optical pyrometry with emissivity compensation and deflectometry for measuring parameters of epitaxial semiconductor layers Head Voronko Andrii O., к.т.н. Registration Date 27-02-2025 Organization National Technical University of Ukraine «Igor Sikorsky Kyiv Polytechnic Institute» popup.description1 Research and development of optoelectronic pyrometer and deflectometer registration systems for measuring parameters of semiconductor layers during epitaxial growth popup.nrat_date 2025-02-27 Close
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Head: Voronko Andrii O.. Experimental methods of optical pyrometry with emissivity compensation and deflectometry for measuring parameters of epitaxial semiconductor layers. National Technical University of Ukraine «Igor Sikorsky Kyiv Polytechnic Institute». № 0125U001384
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Updated: 2026-03-21