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Information × Registration Number 0200U003152, 0198U002386 , R & D reports Title Simulation of temperature fields in the microlectronic devices construction at technological equipment during their production popup.stage_title Head Fedasyuk D.V., Registration Date 17-03-2000 Organization Lviv Polytechnic State University popup.description2 Gasphase operations, which are widely used in IC industry, can be simulated separately by developed package of applied program (PAP). PAP allows to compute the thickness of deposited film, sheet resistance and surface concentration of impurity on wafer. . PAP uses gasdynamics model, heat- and masstransfer models for explaining . PAP may be used for teaching purposes, for technical stuff learning, at stage of design of technological cycle, for clarifying cause waste a t industry. Product Description popup.authors popup.nrat_date 2020-04-03 Close