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Information × Registration Number 0203U002466, 0100U003301 , R & D reports Title Examination of requirements of forming charged particles streams of low and medial energies, methods of guidance of their parameters and interaction of synthesized streams with surfaces of solid bodies popup.stage_title Head Farenik V.I., Registration Date 23-06-2003 Organization Kharkov National University named after V.N. Karazin popup.description2 Object of research: gas discharges in DC and RF to electric combined fields; low energy ion and electron flows that can be used in vacuum plasma deposition technologies of simple and synthesized coverings; surface of solid under action of low energy ion streams. Aim of the work: research of generation processes of charged particles in the combined magnetron - RF inductive discharge, of managing methods of streams of charged and neutral particles in conditions of separate plasma generation and stream formation zones as well as prcesses of bearing and growth of 3D thin film structures at interaction of the synthesized streams with surface of solid. Research methods: experimental researches of the discharge characteristics of plasma systems, plasma parameters and power spectrums of ion and electron streams, investigation of physical and chemical properties of thin film structures. Experimentally stated a modified Pashen law for low pressure gas break-down in homogeneous permanent electric field Udc=f(pL, L/R), i.e. Udc break-down voltage appears both as function of product of gas pressure and gap size pL, and a function of gap size attitude L to radius of disharge chamber R. Forming conditions of double electric layer in the front of dense anode plasma have been explored in the case of thermal anode material vaporization under influence of electron beam in devices with plasma electron emitter. The stabilization conditions of double layer in the front of dense anode plasma have been defined, as well as basic dependencies for systems computation of thermo-ion deposition with plasma emitter. The leave form structures growth effect have been discovered on surface of solid under bombardment by streams of charged and neutral atomic particles. The researches have shown, that among parameters, which influence on growth of such structures at low substrate temperature, it should be taken into account the discharge current, nature of working gas, surface cleanness of the cathode, its chemical composition and structure. Especial role the processes of mass transport play, which are complicated in this case. Product Description popup.authors popup.nrat_date 2020-04-02 Close