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Information × Registration Number 0204U003069, 0101U006347 , R & D reports Title The study of chemical physics processes in surfase layers of semiconductors during interaction with asselerated and thermal energy atomic particles. popup.stage_title Head Yanovsky A.S., Registration Date 27-01-2004 Organization Zaporozhye State University popup.description2 Quantum-chemical modeling of the partial acts of interaction of nuclear particles with surface model structures carried out. Existing experimental procedures of examination of interaction of atomic particles of thermal energies with a solid state were developed. Thermodynamic modeling of the composite heterogeneous systems carried out. Results are tested at international conferences in Italy, Netherlands, China, Sweden, Moscow. A field of application is a physics of monatomic clear surfaces, technology of microelectronic semiconductor devices, catalysis, kinetics of heterogeneous chemical reactions. Product Description popup.authors popup.nrat_date 2020-04-02 Close