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Information × Registration Number 0204U003531, 0103U007311 , R & D reports Title Development of practical diagnostic methods for accompaniment of actual technologies for nanostructures production with specified physical and physico-chemical parameters and characteristics popup.stage_title Head Prokopenko I.V., Registration Date 24-03-2004 Organization Institute of Semiconductor Physics of NAS of Ukraine popup.description2 The new XRD technique has been suggested. The technique allows to control structural and chemical parameters of short-period GaAs-AlAs superlattices (sublayer's structure perfection, thickness, roughness, strains, composition) by means of the quasiforbidden reflections rocking curves analysis. The realized surface reconstruction algorithm makes possible to characterize of subnanometers surface features (smaller than 5 nm). Product Description popup.authors popup.nrat_date 2020-04-02 Close