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Information × Registration Number 0206U004157, 0103U003689 , R & D reports Title Technological fundamentals of obtaining of the metallized covers on items microopticians and nanoelectronicss by an electron-beam method. popup.stage_title Head Vaschenko Vyacheslav Andreevich, Доктор технічних наук Registration Date 13-02-2006 Organization Cherkasy State Tehnological University popup.description2 The electronic technology and the equipment for the receiving of the metallized coverages on the microoptics and nanoelectronics wares is the research object. The research and study of possibilities of electron beam influence on the material (optical glass) for the creation of element base of microoptics and nanoelectronics is the purpose of the project as well as receiving of patents of Ukraine, that will provide the priority of Ukraine in the indicated sphere. The results of review of patent and technical literature is presented in the first part of this report. It is set as the result, that the lowenergy streams of electrons allow: to conduct the directed physics-technical change of superficial layers of optical materials; to form the microrelief on the optical surface and waveguides of various trajectories; to get juvenile surfaces and plates optical glass. In the second part the description of the technological equipment for the receiving of the metallized coverages on the microoptics and nanoelectronics wares is pointed out by the electron beam method, namely: armature for the electron beam options for treatment of optical materials without coverages and with the metallized coverages, the stove of heating with the system of program management, the high-voltage source of feed of electron beam Pirs gun, source of feed of resistive vaporizer, the mechanism of the mechanical moving of forward action with the microprocessor system of management. The detailed description of projected and created electronic Pirs gun, which allows substantially to increase the quality, efficiency and reproduced of results of optical wares treatment is held. In the third part the developed methods of experimental researches of electronic Pirs gun are considered, namely: the method of computation of parameters of wire to the cathode for an electronic Pirs gun and the method of measuring of electronic stream band parameters by the form and size of electronic ribbon. A fourth part is devoted to the development of mathematical model for computation of distributing of the thermal fields in optical materials from action of electronic stream band. In a fifth part the results of researches of reflecting tapes of aluminium, copper, chrome and nickel and relief structures (one- and two-sides orthogonal and decagonal lens rasters with the diameters of lenses of 30...120 mkm and height 250...1500 nm) on the surfaces of plates of round (by a diameter 20 mm; by a thickness 1; 2; 6 mm) and rectangular form are led (80x4x4; 80x22x4; 25x20x1 mm) from optical glass of brands K8, БK10, TK21, and also photographic plates. Also definite optimum modes of technological process for the resistive sawing of materials and for relief-creating by an electronic method. The researches were conducted by means of the methods according to the Industrial Standard 3-1901-85, and also with the use of methods of atomic-power microscopy (device NT-206V), optical microscopy (device MБС-9) and by means of the method of a trial glass. The results of the work can be inculcated in research institutes and designer bureaus, that are engaged in planning and product development of microoptics and integral optics and integral-optical adaptations of the special setting. The application domain of the results of researches is the microoptics, fiber optics and integral optics, exact device-building, computer and television communication, medical technique. Product Description popup.authors popup.nrat_date 2020-04-02 Close