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Information × Registration Number 0207U000155, 0104U008839 , R & D reports Title Bases of technology creation for forming and control of functional nanostructure on the semiconductors surface and metals with the guided microzond devices popup.stage_title Head Voronko Andrey, Registration Date 11-01-2007 Organization The closed Joint-stock Company "Research-and-production concern "Science" popup.description2 As a result of experimental research optimal working regimes were chosen for experimental technological line for investigation of nanostructure surfaces of different materials (semiconductors and metals) and also for local anode oxidization. Basing on physic-chemical model of anode oxide films creation a research has been held in order to study the process of local sonde oxidization. There have been determined main rules of material, thickness of covering, parameters of applied voltage, humidity of environment influence on resolution capacity of method and properties of the oxide. There has been created an experimental model of multifunctional module of scanning tunnel microscope for analysis and modification of semiconductor and metal surfaces at submicron level. Then it has been tested. It was demonstrated that super high vacuum camera УСУ-4 has limit characteristics at the level of modern demands to super high vacuum devices. Its usage as an analytical reactor in nanolithgrapgy unveils potential ofrealization of conditions on the surface of the model in nanolithographic processes up to purity at atomic level. Product Description popup.authors popup.nrat_date 2020-04-02 Close