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Information × Registration Number 0207U000160, 0104U008838 , R & D reports Title Technological methods development for forming of topology submicron norms for the creation of superhighfrejuency devices of millimetric range small making to noise popup.stage_title Head Korzhinsky Fedor, Registration Date 11-01-2007 Organization The closed Joint-stock Company "Research-and-production concern "Science" popup.description2 As a result of work a technological line of submicron-nanometer lithography, technological methods of submicron structures formation has been created. Their characteristics meet highest international technological standards. An analysis of requirements to materials, constructions and physical principles which are the basis of operation of devices with nano-sized channels basing on АІІІВV compounds has been performed. There has been developed a technology of planar nano-transistors, route technology of their production. A model of planar transistor has been created along with measuring its characteristics. Product Description popup.authors popup.nrat_date 2020-04-02 Close