Search academic texts

Information × Registration Number 0208U000849, 0107U005753 , R & D reports Title Development of microsystem technology of sensors and micromrchanical systems based obn silicon. popup.stage_title Head Kozlovskiy Sergei Ivanovich, Registration Date 20-02-2008 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 The micro system technology of transducers that converts a mechanical signal (pressure, force, acceleration, flow) into electrical quantity is elaborated. It is capable to produce the precision transducers by integral circuitry methods with low energy consumption and small cost.5635 Product Description popup.authors popup.nrat_date 2020-04-02 Close