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Information × Registration Number 0208U002418, 0107U005254 , R & D reports Title Development and manufacture of the transmitter pressure pair at electron-beam sputtering. popup.stage_title Head Lankin Juriy Nikolajovich, Registration Date 28-01-2008 Organization E.O.Paton Electric Welding Institute of the National of Sciences of Ukraine popup.description2 Developed mechanotrons sensor of vapor pressure in the electron beam physical vapor deposition (EB-PVD), witch allows to estimate intention of deposition. The sensor is intended far monitoring and automatic control systems of the EB-PVD processes. Product Description popup.authors popup.nrat_date 2020-04-02 Close