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Information × Registration Number 0211U006890, 0110U005701 , R & D reports Title Development of new method of measurement of thermal kinetic coefficients of film structures, manufacture and thermal conductivity investigation of nanothickness multilayer film structures, testing of theoretical models. popup.stage_title Head Nikolayenko Yuriy Makarovich, Registration Date 13-05-2011 Organization A.A. Galkin Physics and Engineering Institute of National Academy of Science of the Ukraine popup.description2 We considered the problem of technological variation of the thermal resistance of a film-substrate interface in the methodological context of modern nanotechnology. To present the method and equipment, we review our previous most significant results and publications. The vacuum container for the time-resolution thermometry of a film structure was designed, manufactured and tested. From a methodological perspective of manufacture of multilayer film structures, the magnetron equipment for sputtering of multicomponent ceramics target was improved. For the purpose of numerical modeling of a film temperature, when the film is subjected to a pulse heating, the computer program is written and tested. Product Description popup.authors Медведєв Ю.В. Самольотов О.О. popup.nrat_date 2020-04-02 Close