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Information × Registration Number 0212U005060, 0104U007801 , R & D reports Title Production of experimental elements based on inorganic resists and their characteristics investigation popup.stage_title Head Kostyukevych S.O., Registration Date 22-02-2012 Organization Institute of Semiconductor Physics of National Academy of Sciences of Ukrain popup.description2 Produced experimental elements based on inorganic resists and carried out scientific investigations of their characteristics, and determined their satisfaction to demands of appropriate documents. Product Description popup.authors popup.nrat_date 2020-04-02 Close