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Information × Registration Number 0213U001285, 0111U002282 , R & D reports Title The study of widening X-ray spectral range of utilization for nanoscale multilayer coatings as reflecting and imaging X-ray optics popup.stage_title Head Kondratenko Valeriy, Registration Date 08-02-2013 Organization The Kharkov state polytechnical university popup.description2 The object of the study: nanoscale multilayer coatings (NMCs) of different materials (Sb, W, Mo, Si, C, B4C) with nanometer and subnanometer layer thickness, their structural and substructural characteristics, formation of interlayers. The goal: to study multilayer coatings on the base of W/B4C, Co/C, Sb/B4C and Mo/Si pairs; to find structural and compositional changes in NMCs with layer thickness of 1 nm and less; to reveal initial stages of intermixing and interaction of adjacent layers in the growing process and to follow the structural modifications during annealing; the test of new perspective multilayer pair of Sb/B4C. Scientific and applied significance consists in revealing new results in thin film (<10 nm) growth, interaction and interdiffusion at interfaces of metal/( Si, C, B4C) NMCs within the subnanometer regions. It is improved the technology of depositing NMCs with layer thickness less than 2 nm (Sb/B4C, Co/C, W/B4C); there were developed different techniques to analyze various NMCs with subnanometer layer and interlayer thickness. Physical and technological techniques are developed for controllable deposition of Co/C NMCs onto figured substrates of convex and concave forms with subangstrom precision of layer thickness. There were improved the technology of W/B4C NMC fabrication with layer thickness of less than 1.5 nm resulting in at least 1.4-fold efficiency raising within the wavelength range of 0.8-3 nm. New NMC of Sb/B4C is developed and produced suitable for wavelength range of 6.7-12.3 nm and perspective as X-ray optical element in X-ray lithography of the next generation. Developed techniques and technology allow fabricating X-ray optics and objectives for imaging systems. Product Description popup.authors Бугаєв Єгор Анатоліойвич Девізенко Олександр Юрійович Журавель Ігор Олександрович Зубарєв Євген Миколайович Кондратенко Валерій Володимирович Конотопський Леонід Євгенович Копилець Ігор Анатолійович Мішньова Надія Кузьмівна Першин Юрій Павлович Севрюкова Вікторія Анатоліївна popup.nrat_date 2020-04-02 Close