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Information × Registration Number 0213U001712, 0111U001466 , R & D reports Title Development of the complex methods for formation and treatment of the functional depositions by charged particale beams with high power consumption popup.stage_title Head Tseluyiko Olexandr, Кандидат фізико-математичних наук Registration Date 24-01-2013 Organization Kharkov National University named after V.N. Karazin popup.description2 The subjects of present investigation are the principally new methods of producing the charged particle beams and radiation in the range of extreme ultraviolet, as well as development of breadboard devices with high power density aimed for the functional coatings production and micro/nano- processing. The project purpose is elaborating the methods of functional coatings production and micro/nano- processing with the help of high power density electron and ion beams. The methods are both theoretical and experimental investigations of: "the high power density focused keV ion beam formation conditions and development of breadboard of Hall thruster with ballistic and magnetic ion beam focusing; "intensive low-energy ion beam formation conditions in surface layers of space charge of plasma-beam discharge with filament cathode and source breadboard development; "conditions of space charge double layer formation around thermionic plasma, as well as thermionic deposition breadboard system development; "directed superfluorescence formation conditions in high-current pulse plasma-beam discharge, as well as breadboard source development for surface activation by extreme ultraviolet. Hall ion source with ballistic and magnetic beam focusing, thermionic and gas-core coatings deposition system as well as intensive source of directed extreme ultraviolet were developed as a result of present research and development project. These devices will be used for further investigations of functional coatings production and micro/nano- processing technologies (for microelectronics, optics, communications, nuclear fission and fusion power engineering). Product Description popup.authors Бізюков І. Бізюков О. Боргун Є. Гірка О. Рябчиков Д. Середа І. Целуйко О. popup.nrat_date 2020-04-02 Close