Search academic texts

Information × Registration Number 0214U002892, 0113U002889 , R & D reports Title The development of new technological methods of formation and control of micro-and nanostructures using highlokal electromagnetic fields that are created by scanning microwave microscopy popup.stage_title Head Slipchenko Nikolai, Registration Date 31-01-2014 Organization Kharkiv National University of Radioelectronics popup.description2 Developed methods for the theoretical description and numerical simulation, which most adequately reflect the nature of the processes of modification actions localized microwave radiation, which allows to optimize the modes of technological methods and design of electron microprobe structures. Experimentally determined the direction of the creation of the technological equipment and methods of development of new technological processes of the formation and control of micro - and nanostructures.5481 Product Description popup.authors Бендеберя Г.М. Бондаренко І.М. Гордієнко Ю.О. Гуд Ю.І. Полєтаєв Д.О. Сергєєв П.Ю. Таран Є.П. Троїцький С.І. popup.nrat_date 2020-04-02 Close