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Information × Registration Number 0214U003830, 0113U003188 , R & D reports Title The research of measuring devices of geometric dimensions by optical methods in the nanometer range. popup.stage_title Head Stadnyk Bogdan, Доктор технічних наук Registration Date 03-03-2014 Organization Lviv Polytechnic National University popup.description2 The analysis of the problems and directions of development of the measuring instrumentation for geometric dimensions on the nanoscale and the study of the structure and characteristics of the optical sensors have been done. Classification of the optical measurement tools for geometric dimensions on the nanoscale has been performed and the models of confocal, focal and interferometric sensors have been considered, the main factors affecting the accuracy of measurement results have been analyzed. The main factors that limit the application of optical systems in nanomeasurments have been investigated.5481 Product Description popup.authors Волицький Р.О. Гамула П.Р. Луцик Я.Т. Микитин І.П. Пучинський Б.В. Сасюк Т.М. Семенистий А.В. Сенів Г.Б. Скоропад П.І. Стадник Б. І. Тищенко О.С. Хома Ю.В. Шендера О.Т. Яцишин С.П. popup.nrat_date 2020-04-02 Close