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Information × Registration Number 0214U007667, 0113U003188 , R & D reports Title The research of measuring devices of geometric dimensions by optical methods in the nanometer range. popup.stage_title Head Stadnyk Bogdan, Доктор технічних наук Registration Date 25-12-2014 Organization Lviv Polytechnic National University popup.description2 Mathematical model of optical sensors (confocal, focus and interferometric) were synthesized. Impact of environmental parameters (temperature, pressure, relative humidity and carbon dioxide concentration) and laser parameters (wavelength) on the accuracy of measurement of geometrical dimensions on the nanoscale have been investigated. Correction algorithms that allows to increase the accuracy of measurement at the stage of data processing have been developed.5481 Product Description popup.authors Волицький Р.О. Гамула П.Р. Луцик Я.Т. Микитин І.П. Пучинський Б.В. Сасюк Т.М. Семенистий А.В. Сенів Г.Б. Скоропад П.І. Стадник Б. І. Тищенко О.С. Хома Ю.В. Шендера О.Т. Яцишин С.П. popup.nrat_date 2020-04-02 Close