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Information × Registration Number 0217U001660, 0116U006302 , R & D reports Title Development and research of a new type of plasma source for uniform processing of large surfaces on the basis of the helicon discharge with a linear excitation system popup.stage_title Head Virko Valerij Fedorovich, Registration Date 15-03-2017 Organization Institute For Nuclear Research Of National Academy Of Sciences Of Ukraine popup.description2 The study of plasma density distribution in the modified helicon discharge with linear inductive extended (40 cm length) antenna hawe been compleated. The distribution of ion current to the collector, which moved along antenna in a slot in a conductive plane wich simulates the processing surface have been investigated. The investigations ware made in discharge excited in the resonance conditions, when the distance between the antenna and the surface is greater than the length of a standing helicon wave in the direction of the magnetic field. The influence of the configuration of the magnetic field on the characteristics of the discharge hawe been investageteg. It is found that the discharge mode with homogeneous concentration profile along the antenna can be achieved in a homogeneous magnetic field generated by electromagnetic coils as well as in the cace of using both permanent magnets and additional coil near antenna. Besides argon, linear discharge in molecular gases (H2, N2, CH4) was also investigated. It was found that a homogeneous concentration profile can be obtained from a mixture of methane with 10% argon for some values of RF power and magnetic field strength. Product Description popup.authors Борисенко Анатолій Григорович Вірко Юрій Валерійович popup.nrat_date 2020-04-02 Close