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Information × Registration Number 0217U003415, 0117U000542 , R & D reports Title Visualization of defects in silicon wafers corona discharge and control their TV popup.stage_title Head Poryev Volodymyr Andriyovych, Registration Date 10-04-2017 Organization National Technscal University of Ukraine "Kiev Polytechnic Institute". popup.description2 1. TV improved means of measuring brightness and geometric sizes of corona discharge by reducing errors geometrical dimensions of surface defects in a corona discharge excited 2. Studied defects in silicon wafers that have been activated in a corona discharge Product Description popup.authors Божко Костянтин Михайлович Морозова Ірина Володимирівна Порєв Володимир Андрійович Рудик Тетяна Олександрівна Сидоренко Сергій Юрійович Суліма Ольга Вікторівна popup.nrat_date 2020-04-02 Close