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Head: Korotieiev Vadym Vyacheslavovych. Development of the extreme ultraviolet interference lithography technologies for a fabrication of nanosized plasmonic structures "metallic grating-semiconductor heterostructures" and investigations of the structures as core elements of terahertz radiation sources.. (popup.stage: ). Institute of Semiconductor Physics. № 0218U001770
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Updated: 2026-03-20
