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Information × Registration Number 0220U102349, 0117U000928 , R & D reports Title Universal vacuum post for multy-layer covering. popup.stage_title Head Kolomiiets Volodymyr M., Кандидат фізико-математичних наук Registration Date 12-03-2020 Organization Institute of Applied Physics, NAS of Ukraine popup.description2 The complex of works was carried out to develop the modern vacuum universal device for controlled deposition of both single and multilayer coatings in the atmosphere of one gas or mixture of gases based on the method of magnetron sputtering using high power pulses using 4A PLASMA switching power supply (unmatched in Ukraine) with full remote control via PC. The vacuum device is based on the use of modern turbomolecular pumps and vacuum sensors and the latest control and control systems for the coating process. The vacuum universal device was tested and multilayer films based on tantalum and niobium were obtained under different technological modes.   Product Description popup.authors Buhaiov Serhii I Kanivecs Volodimyr M. Kravchenko Serhii M. Pavlenko Yurii A. Samoilov Pavlo Ye Shkurat Oleksandr I. popup.nrat_date 2020-04-01 Close