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Information × Registration Number 0222U001187, 0120U102500 , R & D reports Title Development of a versatile computer-assisted control and data acquisition system of scientific, educational and technological equipments popup.stage_title Head Sayko Mykola O., Registration Date 24-01-2022 Organization Institute of Applied Physics National Academy of Sciences of Ukraine popup.description2  According to the technical design specifications and standard technical specifications, the design and design documentation for the following components of the system is made: sensors and PLC module for vacuum measurement, power supply board for EM valves, PLC input/output module, stepper motor control module, substrate temperature controller module, high voltage modules power supply unit, HORIBA flow valve control module, TMP control board. The general electric scheme of system connections is developed. Product Description popup.authors Ignatenko Sergey M. Kolomiiets Volodymyr М. Mariychuk Oleksandr V Ridchenko Sergey O. popup.nrat_date 2022-03-09 Close