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Information × Registration Number 0222U001560, 0117U002267 , R & D reports Title To develop technology of long-term data storage based on submicron lithography methods. popup.stage_title Head Petrov Vyacheslav V., Доктор технічних наук Registration Date 28-01-2022 Organization Institute for Information Recording NASU popup.description2  The technology of optical data recording on the glass and sapphire substrates of optical data storage is built, the requirements for the selection of optical disks for further plasma-chemical etching of carrier substrates with proper form recording modes are determined. Product Description popup.authors Beliak Ievgen V Borodin Yuriy O Gorbov Ivan V Kryuchyn Andriy A Manko Dmytro Yu Morozov Yevgeniy M Pankratova Antonina V Shanoylo Semen M Shikhovets Olexiy V popup.nrat_date 2022-03-09 Close