Search academic texts

Information × Registration Number 0300U002056, 0100U000165 , R & D reports Title Development of the researeh-plant and technology ultra-violet lithography GaAs of structures submicron of sizes popup.stage_title Розробка структурної схеми установки.Реконструкція технологічного боксу.Визначення потрібних характеристик основних вузлів установки.Моделювання оптичного блоку установки Head Obolons'kyj Valerij Oleksandrovych, Registration Date 10-10-2000 Organization State scientific research centre "Fonon" popup.description2 In an outcome of conducted work the block diagram is developed. The reconstruction of technological boxing is conducted. The breadboard model of the optical block of installation(aim) is developed. The performances of main knots of installation(aim) are certain(determined) which ensure reachings requests of the technical project. The annual report is prepared. Product Description popup.authors popup.nrat_date 2020-04-03 Close