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Information × Registration Number 0305U001855, 0104U009359 , R & D reports Title Design and Construction of an RF Generator for the Magnetron Deposition Unit popup.stage_title Розробка та виготовлення високочастотного генератора для установки магнетронного осадження плівок Head Baturin Vladimir Andreevich, Кандидат фізико-математичних наук Registration Date 11-05-2005 Organization Applied Physics Institute NAS of Ukraine popup.description2 The object of research are physical devices for carrying out the process of a cathode spattering of the materials in low-temperature plasma of a gas high-frequency generator. The aim of the study is design of HF generator for excitation of a discharge in magnetron evaporator MP-3. During the study theorerical and practical research of high frequency parameters of a magnetron evaporator MP-3, the ways of coordination of HF generator with a load, the optimization of HF generator module was carried out. The work resulted in working sample of HF generator with effective system of stabilization of power level in load5635 Product Description popup.authors popup.nrat_date 2020-04-02 Close