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Information × Registration Number 0308U001767, 0108U000895 , R & D reports Title Development of optimised microsystem technology of production of integral structures for precise sensitive elements of electromechanical transducers. popup.stage_title Розробка оптимізованої мікросистемної технології, виготовлення інтегральних структур для прецизійних чутливих елементів електромеханічних перетворювачів. Head Sharan Mikola Mikolaevich, Registration Date 03-03-2008 Organization "Polus" Radio and Electronics Reserch and development centre popup.description2 Correction of topology of experimental structures of sensitive elements for pressure transducers are elaborated. Optimisied technology of fabrication of integrated structures for sensitive elements of electromechanical transducers has been designed. Technological route has been conducted and sensitive elements have been producted.5635 Product Description popup.authors popup.nrat_date 2020-04-02 Close