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Information × Registration Number 0311U003683, 0106U003218 , R & D reports Title The interconnection between parameters of gases discharge and characteristics metallic and metalloid thin films at a deposition by ion - plasma methods are research. popup.stage_title Розробка комп’ютерних програм для моделювання на основі створених моделей. Проведення моделювання, порівняння його результатів з результатами експерименту. Head Therpy Dmitry N., Registration Date 21-06-2011 Organization Donbass State Engineering Academy popup.description2 The object of study: the processes taking place during the formation of thin films and coatings, films and coatings diborides transition metals (Ta, Hf, V, Zr). Objective: To establish the relationship between power characteristics and density of jets of particles (atoms, clusters, ions) and the mechanisms of film growth of metal compounds. On this basis, develop mechanisms and algorithms that would predict the composition, structure and properties of the films. Methods: optical microscopy, measurement of nano-and microhardness, electron microscopy, elemental analysis and X-ray crystallography, computer modeling by the Monte Carlo. Developed physical mechanisms, which, with reasonable accuracy simulate the behavior of sputtered material when moving through the discharge gap. Based on these mechanisms to develop programs for analytical calculations and simulation of the Monte Carlo. Theoretical results are compared with those obtained experimentally. The highest line gives the simulation results. Product Description popup.authors Дьяченко Юрій Григорович Коновалов Владілен Анатолійович Лаптєв Олександр Михайлович Мінков Олександр Миколайович Петухов Вадим Вікторович Плеханова Лідія Валентинівна Рульов Віктор Іванович Терпій Дмитро Миколайович Ткачов Олексій Іванович popup.nrat_date 2020-04-02 Close