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Information × Registration Number 2112U001619, Article popup.category Thesis Title popup.author popup.publication 01-01-2012 popup.source_user Сумський державний університет popup.source http://essuir.sumdu.edu.ua/handle/123456789/35409 popup.publisher Sumy State University Description The paper presents the results of the authors many year work in the field of ion&plasma sources development. The families of DC and RF ion and plasma sources are described. The results of ion&plasma sources utilization in materials surface modification technologies are discussed. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35409 popup.nrat_date 2025-05-12 Close